DB-FIB
Selelekela sa Tšebeletso
Hajoale, DB-FIB (Dual Beam Focused Ion Beam) e sebelisoa haholo lipatlisisong le tlhahlobong ea lihlahisoa libakeng tse kang:
Lisebelisoa tsa ceramic,Li-polymers,Lisebelisoa tsa tšepe,Lithuto tsa baeloji,Li-semiconductors,Geology
Sebaka sa tšebeletso
Lisebelisoa tsa semiconductor, lisebelisoa tse nyane tsa molek'hule, lisebelisoa tsa polymer, lisebelisoa tsa organic/inorganic hybrid, lisebelisoa tse se nang tšepe.
Sebaka sa Ts'ebeletso
Ka tsoelo-pele e potlakileng ea lisebelisoa tsa elektroniki tsa semiconductor le theknoloji e kopaneng ea potoloho, ho rarahana ho ntseng ho eketseha ha lisebelisoa le meaho ea potoloho ho phahamisitse litlhoko tsa tlhahlobo ea ts'ebetso ea microelectronic chip, tlhahlobo ea ho hloleha, le tlhahiso ea micro/nano.Sistimi ea Dual Beam FIB-SEM, ka bokhoni ba eona bo matla ba ho sebetsa ka mokhoa o nepahetseng ka nepo le ho hlahloba ka maekesekopo, e se e le ea bohlokoa haholo moralong le tlhahisong ea lielektronike.
Sistimi ea Dual Beam FIB-SEMe kopanya ka bobeli Focused Ion Beam (FIB) le Scanning Electron Microscope (SEM). E nolofalletsa pono ea nako ea sebele ea SEM ea mekhoa ea micromachining e thehiloeng ho FIB, e kopanyang qeto e phahameng ea sebaka sa sefate sa elektronike le bokhoni bo nepahetseng ba ho sebetsana le lisebelisoa tsa ion beam.
Lintho tsa Tšebeletso
Sebaka-Specific Cross-Section Preparation
TEM Mohlala oa Litšoantšo le Tlhahlobo
SKhetho ea ho Etching kapa Tlhahlobo e Ntlafetseng ea Etching
MEtal le Insulating Layer Deposition Testing
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