Ka nts'etsopele e tsoelang pele ea li-circuits tse kholo tse kopantsoeng, mokhoa oa ho etsa li-chip o ntse o rarahana le ho feta, 'me sebopeho se sa tloaelehang sa microstructure le sebopeho sa lisebelisoa tsa semiconductor li sitisa ntlafatso ea lihlahisoa tsa chip, tse tlisang mathata a maholo ho kenngoeng ts'ebetsong ha semiconductor e ncha le theknoloji e kopanetsoeng ea potoloho.
GRGTEST e fana ka tlhahlobo e felletseng ea lisebelisoa tsa semiconductor le tlhahlobo ho thusa bareki ho ntlafatsa semiconductor le lits'ebetso tse kopaneng tsa potoloho, ho kenyeletsoa ho lokisoa ha profil ea boemo ba semiconductor le tlhahlobo ea elektroniki, tlhahlobo e felletseng ea thepa ea 'mele le ea lik'hemik'hale ea lisebelisoa tse amanang le tlhahiso ea semiconductor, tlhahiso le ts'ebetsong ea lenaneo la tlhahlobo ea litšila tsa semiconductor.
Lisebelisoa tsa semiconductor, lisebelisoa tse nyane tsa molek'hule, lisebelisoa tsa polymer, lisebelisoa tsa organic/inorganic hybrid, lisebelisoa tse se nang tšepe.
1. Ho lokisoa ha boemo ba boemo ba chip bafer le tlhahlobo ea elektronike, ho itšetlehile ka theknoloji e tsepamisitsoeng ea ion beam (DB-FIB), ho itšeha ho nepahetseng ha sebaka sa sebaka sa chip, le litšoantšo tsa elektronike tsa nako ea sebele, li ka fumana sebopeho sa chip profile, sebopeho le boitsebiso bo bong ba bohlokoa ba ts'ebetso;
2. Tlhahlobo e felletseng ea thepa ea 'mele le ea lik'hemik'hale ea lisebelisoa tsa tlhahiso ea semiconductor, ho kenyeletsoa lisebelisoa tsa organic polymer, lisebelisoa tse nyane tsa molek'hule, tlhahlobo ea sebopeho sa inorganic non-metallic, tlhahlobo ea sebopeho sa limolek'hule, joalo-joalo;
3. Ho theha le ho kenya ts'ebetsong moralo oa tlhahlobo ea litšila bakeng sa lisebelisoa tsa semiconductor. E ka thusa bareki ho utloisisa ka botlalo litšobotsi tsa 'mele le tsa lik'hemik'hale tsa litšila tse silafatsang, ho kenyelletsa: tlhahlobo ea sebopeho sa lik'hemik'hale, tlhahlobo ea likarolo tsa likarolo, tlhahlobo ea sebopeho sa limolek'hule le tlhahlobo e' ngoe ea litšobotsi tsa 'mele le tsa lik'hemik'hale.
Tshebeletsomofuta | Tshebeletsolintho |
Tlhahlobo ea sebopeho sa mantlha sa lisebelisoa tsa semiconductor | l Tlhahlobo ea mantlha ea EDS, l X-ray photoelectron spectroscopy (XPS) tlhahlobo ea motheo |
Tlhahlobo ea sebopeho sa limolek'hule tsa lisebelisoa tsa semiconductor | l FT-IR tlhahlobo ea mabone a marang-rang, l tlhahlobo ea spectroscopic ea X-ray diffraction (XRD), l Nuclear magnetic resonance pop Analysis (H1NMR, C13NMR) |
Tlhahlobo ea microstructure ea lisebelisoa tsa semiconductor | l Tlhahlobo ea selae sa ion beam (DBFIB) e tsepamisitsoeng habeli, l Field emission scanning electron microscopy (FESEM) e ne e sebelisetsoa ho lekanya le ho hlokomela morphology ea microscopic, l Atomic force microscopy (AFM) bakeng sa tlhahlobo ea sebopeho sa bokaholimo |